In order to maintain the required temperature, humidity, wind speed, pressure and cleanliness in the clean room, the most commonly used method is to continuously send a certain amount of treated air into the room to eliminate various heat and humidity interference and dust pollution in the clean room. . In order to obtain the air in a certain state into the clean room, a whole set of equipment is needed to process the air, which is continuously sent into the room, and part of it is continuously discharged from the room. This whole set of equipment constitutes a clean air-conditioning system.

Outdoor fresh air W is sent to the ceiling after purification, cooling, dehumidification, and reheat treatment by the fresh air unit. In order to make the temperature and humidity control of the clean room more stable, the treated fresh air is usually adjusted to the required state N of the clean room, and the DDC (Direct Digital Control) realizes the precise control of the purified fresh air. Since the fresh air unit uses a spray section and a reheat section for spraying clean water, point L should be the dew point of the fresh air machine, which is located vertically below point N. The H-state return air treated by the FFU installed on the return air duct is mixed with the fresh air processed by the fresh air unit in the ceiling to form O-state air supply, and then filtered by the FFU into the clean room. The clean air sent indoors becomes indoor state N after absorbing sensible heat, part of which is exhausted to the outdoors by the exhaust device of the process equipment, and the other part is reused after FFU treatment.

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