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What standards should be met when building a 100,000-level cleanroom?

Nov 18,2024
How to achieve the 100,000-level cleanroom standard in the construction of a cleanroom, and what should be paid attention to? Wenzhong introduces the following points to you:

Air cleanliness
The maximum allowable number of dust particles: the number of particles greater than or equal to 0.5 microns per cubic meter of air shall not exceed 3.5 million, and the number of particles greater than or equal to 5 microns shall not exceed 20,000.
The maximum allowable number of microorganisms: the number of floating bacteria shall not exceed 500/m³; the number of settling bacteria shall not exceed 10/petri dish

Pressure difference
The pressure difference of clean rooms of the same cleanliness level shall remain consistent. For adjacent clean rooms of different cleanliness levels, the pressure difference shall be >5Pa, and the pressure difference between clean rooms and non-clean rooms shall be >10Pa, so as to ensure that air flows from clean areas to non-clean areas and avoid airflow backflow.

Ventilation frequency
Ventilation is 15-19 times per hour, and the air purification time shall not exceed 40 minutes after full ventilation.

Temperature and humidity
The temperature is generally controlled at 20℃-26℃, which can be controlled at 20℃-22℃℃ in winter and 24℃-26℃ in summer, with a fluctuation of ±2℃℃: the relative humidity is controlled at 30%-50% in winter and 50%-70% in summer.

Noise control
During dynamic detection, the noise level shall not exceed 65dB(A).

Illumination
The total illumination value of the main production area of the clean room should be greater than or equal to 300lx;-the illumination value of the auxiliary studio, personnel cleaning and material cleaning room, closed room, corridor, etc. should be 200-300lx.

Air supply and return air method
Air supply method: local perforated ceiling air supply; ceiling air supply, equipped with high-efficiency air filter and diffuser; upper side wall air supply.
Return air method: the return air outlet is located at the lower part of one side wall; when using corridor return air, the return air outlet should be evenly arranged in the corridor or concentrated at the end of the corridor.
Wind speed: 3-5m/s at the orifice; 2-5m/s at the side air outlet; 1.5-2.5m/s at the lower part of the same side wall, and 1.0-1.5m/s at the lower part of the opposite side wall.

Personnel and equipment management
Personnel entry and exit management: personnel need to change clothes, wash hands, and take air showers before entering to ensure that no dust is brought into the workshop.
Equipment management: Equipment should be maintained and cleaned regularly to reduce dust generation. At the same time, the installation location of the equipment should be reasonable to avoid adverse effects on air flow.

Building and materials
Construction should be selected in a clean environment and away from pollution sources, while considering local climatic conditions such as wind direction, temperature, humidity, etc., to reduce the impact of the external environment on the air quality in the workshop.
Building design should comply with relevant national standards and adopt a closed structure to prevent external dust from entering. Smooth and easy-to-clean materials such as tiles and epoxy resins should be used inside the workshop.
 
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