The electronics industry's requirements for clean rooms in cleanrooms need to be equipped with air showers, clean sheds, FFU purification units, high-efficiency filters, high-efficiency air outlets, and transfer windows. Your requirements are up to standard if these equipments are not equipped.
The electronics industry's requirements for clean rooms in clean rooms: clean rooms are also called clean workshops, clean rooms, clean rooms. There are many types of production processes in electronics factories, and integrated circuit production (divided into photomasks, front processes, and rear processes) Process), Pingnan display production (divided into LCD, PDP, TFT, VFD, picture tube), silicon material production (monocrystalline silicon, polysilicon), optical fiber production, card manufacturing, surface mount (SMT), separation device production ( Power first, second and third level tubes, capacitors, resistors), complete machine assembly production (set-top box, digital projector, electronic digital camera), automatic control component production (sensors, actuators), etc.
Due to the variety of production processes, the requirements for cleanliness levels are different, high is high, and low is low; the requirements for particle size control are also different, ranging from about 0.1 to 5um; the requirements for temperature and humidity control are relatively high For example, the previous steps of integrated circuits generally require a base temperature of 22 ° C (accuracy ± 0.1 to ± 1 ° C) and a relative humidity base of 40% (accuracy ± 2 to ± 5 ° C; the gradient level required for positive pressure values is The degree of cleanliness changes from high to low, the difference is 5 ~ 10Pa.
The cooling load of the dust-free workshop in the electronics industry is much larger than that in other industries, and the unit cooling load is 400 ~ 500W / ㎡. Due to the large cooling load, cooling is also generally required in winter, which is a characteristic of the electronics industry.
There are many types of harmful gases generated in the production process of the electronics industry, and the quantities are also large, so the amount of exhaust air and fresh air required is also large. The energy saving measures of new exhaust air are also one of the industry's characteristics. Before discharge, treatment should be done to make the exhaust air load environmentally friendly.
The production process of the electronics industry requires antistatic and anti-vibration requirements, and there are many types of bulk gases and special gases, which require high purity and cleanliness:
1. Noise level (empty state) of 10,000-level clean room in electronics factory: should not be greater than 65dB (A)
2. The clean room in the electronics factory's clean room should not be less than 60% full, and the horizontal unidirectional flow clean room should not be less than 40%, otherwise it will be a partial unidirectional flow.
3. The static pressure difference between the clean room and the outdoor of the electronics manufacturer should not be less than 10Pa, and the static pressure difference between the clean area and the non-clean area with different air cleanliness should not be less than 5Pa
4. The amount of fresh air in the 10,000-level clean room of the electronics manufacturing industry should take the maximum of the following two items:
5. The sum of the indoor air volume and the amount of fresh air required to maintain the positive indoor pressure.
6. Ensure that the amount of fresh air per person per hour in the clean room is not less than 40m3.
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